Sub-Ångström 3D Mapping of Single Impurities in Crystals via Scanning Transmission Electron Microscopy

Quantum computing relies on qubits—two-state quantum-mechanical systems that enable complex computations beyond the reach of classical computers. Semiconductor-based qubits, such as donor atoms in silicon, present a promising path toward scalable quantum technologies. Ion implantation is a strong and industry-compatible candidate for producing qubits on a large scale. However, it faces challenges related to spatial precision during implantation and, more critically, post-processing for activation. This technique can also create colour centres, where precise activation control after implantation is crucial. Sub-Ångström 3D Mapping of Impurities in Crystals via Scanning Transmission Electron Microscopy aims to establish a framework for accurate 3D mapping of donor atoms and lattice displacements. By means of electron microscopy—including in-situ annealing studies — it will provide a robust feedback loop to enhance the precision and reliability of semiconductor qubit formation.